Furnace Accessories.
Crystec

Crystec Technology Trading GmbH
European Semiconductor Equipment Distributor

 Crystec
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Furnace Accessories

Crystec Technology Trading GmbH can offer many accessories for new and used ovens, kilns and furnaces.

Process Gas Treatment

External Torch

In order to receive wet gas for the oxidation of silicon wafers, very pure water is required. This ultrapure water can be generated by an in-situ process: pure hydrogen is burned with pure oxygen. The ultrapure steam is transferred in the furnace chamber. The hydrogen flow and the oxygen flow are controlled by MFCs (mass flow controller). This unit is normally used with vertical furnaces and horizontal furnaces for semiconductor applications.

Wet Gas Device

This wet gas device is laid out to moisten an inert gas and adjust exactly a special dew point. It is designed for wetting process gases in ovens and furnaces. The gas is mixed into the DI water by a rotating stirrer. The dwell time of the gas in the water is rather high and very accurate results can be achieved therefore. The transfer of the wet gas is achieved by a heated process gas line. The content of moisture can be measured by a dew point meter. The flow control is done by the furnace control system, using either flow meters or MFCs.
wet gas device           humidifier graphics

Condensor

For abatement of water steam you can either use a wet scrubber or in case of larger amounts of steam a special steam condensor:
steam condensor

Crystec Technology Trading GmbH, Germany, www.crystec.com, +49 8671 882173, FAX 882177
Linie

Hydrogen Generator, Forming Gas Generator, Ammonia Cracker, Ammonia Dissociator

It is well known that hydrogen is indispensable for the bright hardening of many kinds of metals. But, viewed from the standpoint of economy and safety hydrogen gas is by no means an advantageous atmosphere. Dissociated ammonia atmosphere or "forming gas" is the only furnace atmosphere that can make up the demerits of hydrogen and function nearly 100% as if it were hydrogen gas. There are cases where forming gas cannot replace pure hydrogen, but such cases are very rare. For almost all applications involved, dissociated ammonia atmosphere will answer the purpose.
The Koyo Thermo Systems NH3-Cracker "AM" is used for the production of forming gas. Hydrogen and Nitrogen are generated in a cost effective way in a volume ratio of 3 : 1 or in a weight ratio of 14 : 3. Capacities from 5m3/h to 60m3/h are available.

2 NH3 Pfeil N2 + 3 H2

As a result of complete dissociation into hydrogen and nitrogen, very little undissociated ammonia remains and the dew point temperature of the resulting gas is very low.
The forming gas is used in conveyer furnaces and in tube furnaces for anneal processes in a reducing atmosphere, brazing, sintering, deoxidation, and nitrization. You will find more details about these furnaces in our Koyo Thermo Systems product overview.

ammonia cracker

AM Gas Generator.

Features:

  • Light thermal mass heater: Comparing to conservative type brick furnace, there is lots of reduction in heat-up time, power consumption, foot print.
  • Stable gas generation: Tube type retort integrated in round electrical heater can generate cracking gas stable.
  • Safety feature: Excess temperature protection, over pressure, thermocouple burnt alarm, etc can maintain the system safe.
  • Save foot print, easy operation: Operation switch install on front panel. Insulator got thinner and can realize less foot print.

Endothermic and exothermic gas generator for industrial furnaces

For industrial furnaces further gas generators are available for the production of endothermic gas, consisting of hydrogen, carbonmonoxide, nitrogen and exothermic gas, consisting of hydrogen, water steam, carbon monoxide, carbondioxide, nitrogen.

Crystec Technology Trading GmbH, Germany, www.crystec.com, +49 8671 882173, FAX 882177
Linie

quartz part cleaning

Quartz part cleaning


Polyflow  produces cleaning equipment for all quartz parts of a furnace like process tube, liner, boat, pedestal, cantilever, T/C-tubes, small parts. Cleaning is done by acid spray technology. A combination of actuating and fixed nozzles insures proper cleaning and easy loading of the equipment. Various types of equipment for quartz parts from vertical furnaces and horizontal furnaces for wafers up to 300mm in diameter are available. Drying of the parts is also performed in the equipment. A state of the art touch screen controller makes operation of the tool easy. All main parts of the equipment are made from polypropylen and PVC parts. Fire safe material CPVC and PVDF can be used. You will find further details about these tools on our detailed web-page for quartz part cleaning.
FOUP cleaning

Cassette cleaning

Also for wafer cassette cleaning, SMIF, FOUP and FOSB cassette cleaning, Polyflow can offer a solution. The newest piece of equipment has been designed for cleaning 300mm FOUP and FOSB cassettes. Doors are removed fully automatic and  cleaned separately. Cassettes are cleaned by inside and outside water spraying. Drying is achieved by using high flow gas nozzles. By avoiding rotation damage of the cassettes is prevented and metallic contamination cannot happen, because no steel parts are used.Throughput of this FOUP cleaner is pretty high: 27 cassettes per hour.  You can find more details about this tool on our FOUP cleaning page.

Crystec Technology Trading GmbH, Germany, www.crystec.com, +49 8671 882173, FAX 882177
Linie

Quality Improvement

LGO heating elements LGO

Koyo Thermo Systems manufactures special LGO tube heating elements with a very low thermal mass for semiconductor tube furnaces. Those heating elements can be retrofitted also to used furnaces. You can find more details on a special page about LGO heating elements.

heating elementMoldathermTM heating elements

For heating of conveyer furnaces and also for the heating of special equipment, designed by customers Koyo Thermo Systems manufactures special MoldathermTM heating elements with a very low thermal mass. You can find more details on a special page about MoldathermTM heating elements.

Ultrasonic Belt Cleaner

In order to keep the meshbelt of a conveyer furnace clean, an US belt cleaner can be installed. The meshbelt is drawn through an ultrasonic bath, following a dryer.

Oxygen Analyzer, using a zircondioxid sensor

Sauerstoffsensor
Crystec has good experience with measuring low oxygen concentrations in ovens and furnaces. We can get you various different systems of oxygen analyzers. We can give you an overview over the available oxygen analyzers and prepare comparisons for you. Most oxygen analyzer for measuring low concentrations of oxygen in the ppm range use a heated zirconiumoxide sensor. Different versions are available. It is possible to install a ZrO2 sensor directly inside the oven or furnace for in-situ measurements. It is also possible to use a sample port to extract some gas for the measurements. The sample gas line can be heated, if necessary. The external measurement chamber contains then flowmeter, sampling gas pump and zircondioxide sensor. Wasserstoffsensor The electronic can be installed in the same unit (in a separated area) or in a totally different housing that is installed in a remote place. Also a Stange Controller can be used to dsiplay the results. We can offer the right system for your application.

Hydrogen Analyzer.

For the measurement of hydrogen a sensor based on the measurement of the thermal conductivity can be used.

Crystec Technology Trading GmbH, Germany, www.crystec.com, +49 8671 882173, FAX 882177
Linie

Exhaust Gas Treatment

Cool Trap

Cool Traps of Koyo Thermo Systems are used to condense liquid by-products from process gas. A typical example is the polyimide-cure process, where oligomere hydrocarbon compounds are trapped.

exhaust gas cleaner

     

Detoxifier

SemiAn produces exhaust gas cleaning units for the detoxification of waste gas from production facilities of semiconductor plants, flat panel display production plants and solar batteries. The gas is cleaned by a combination of wet scrubbers and an electrical burner. After cleaning the incoming gas by an inlet water scrubber, the exhaust gas is decomposed by thermal oxidation in an electrical heated reactor. The treated gas is cooled and cleaned by an outlet water scrubber before it discharges from the unit. To avoid any pressure fluctuation to the CVD the intake gas pressure is kept constant by an inverter controlled fan driver. Safety is specially considered, and the warning and alarming system is optimized in design. The system is fully CE marked. Easy operation is ensured by an LCD tough screen controller. Only water and electricity are used to achieve low running costs.

For simple after-burning processes we can also offer proper equipment from Koyo Thermo Systems. You can find detailed information on our INH oven web page.

Crystec Technology Trading GmbH will be pleased to further discuss details with you.
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