Sputter deposition of transparent conductive oxides, TCO, like indiumtinoxide ITO or Aluminiumzinkoxid AZO
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Transparent conductive oxide, TCO

Transparent conductive oxide (TCO) combines two important material properties: transparency and conductivity. Therefore it is used as front electrode material for several applications:

• Liquid crystal displays (LCD) or flat panel displays (FPD)
• Thin film solar cells, consisting of amorphous silicon, Cadmiumtelluride or CIGS
• Touch screen displays

Most stoechiometric oxides are isolators, but some are wideband semiconductors. By doping the oxide or replacing some atoms in the lattice by other atoms with more or less outer electrons, it is possible to generate electrical conductivity. The oxides of indium In, tin Sn and zink Zn are well suited for such an application. Most widely used for LCDs is ITO, indium tin oxide or tin doped indiumoxide Sn:In₂O₃. Some indium atoms (3rd group of PSE, periodic system of the elements) are replaced by tin atoms (4th group of PSE). For solar applications, the cheaper AZO aluminiumzinkoxide or aluminum doped zinkoxide Al:ZnO is used frequently. Here Zn-Atoms (2nd subgroup of PSE) are replaced by Aluminium atoms (3rd group of PSE).

Deposition of TCO by sputter technology

The most common way to deposit transparent conductive oxides on a substrate or superstrate is to use sputter technology. Several targets are mounted in the long modular vacuum system or the sputtering tool. The bombardment of the target by energetic ions ejects atoms from the target and brings them to the gas phase, from where they are deposited on the substrate, which is moving slowly through the vacuum system. The transparent conductive oxide TCO can be deposited on various materials like glass or foil.

Here you can see an indium tin oxide ITO sputter machine from JWA for deposition of ITO films on foil for the manufacturing of touch screen displays.

JWA can offer vaious machines for TCO coating as well as electronic manufacturing services EMS for machine construction aund factory automation. JWA can also offer foundry services for LCD, solar cell, solar module or touch screen manufacturing. Please contact us to discuss further details.

Crystec Technology Trading GmbH will be pleased to further discuss details with you.
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