Four diffusion horizontal

Four diffusion horizontal pour l'industrie semiconducteur
	Koyo Thermo Systems Co., Ltd. est représentée en Europe par Crystec Technology Trading GmbH
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Koyo Thermo Systems Fours Horizontaux

Koyo Thermo Systems manufactures numerous versions of horizontal furnaces with full automation or manual loading. Smaller versions for pilot and laboratory applications are available. These furnaces are known under various different names: Horizontal, diffusion, tube, doping, semiconductor, oxidation furnace, furnaces. They are available for almost all thermal processes used in the semiconductor production technology like diffusion, oxidation, LPCVD ( nitride, poly-silicon, TEOS) as well as solar cell doping by phosphorus oxychloride POCl₃.
Special versions for low temperature applications, e.g. for polyimide baking, copper anneal, low-k anneal, SOG or hydrogen anneal are specialities of Koyo Thermo Systems.

Furnace:

wafer 3" - 8"
flat zone length from 250mm - 1000mm
3 or 4 tubes
DDC / host connection

Construction:

Process isolation with independent tube levels.
Optional lift mechanism for ease of process chamber removal
Positive floor seal with integral leveling frame.
Vertical profile gas plumbing providing for rear process tube removal.

Loading station:

Horizontal laminar flow
Overhead lights
Cantilever or soft lander loading

Scavenger exhaust / Cooling:

Integral element scavenger assembly
(2) Air to water heat exchangers per tube level
Positive seal with exhaust monitor
Load and scavenger exhaust collar diffuses air flow around wafer load during loading and unloading.
Superseal energy kit.

Maintenance / Access:

Independent tube levels with pull out process chambers.
Pressure regulators/gauges located in base of source cabinet for ease access.
All thermocouples entered from source end and are supported the full length of the heat zone.
Front access.
Built in heating element alignment system.

Heating element options:

LGO heater for superior performance up to 1100°C
HGC heater for high temperature applications until 1250°C

Quarzware:

Reaction chamber, consisting of quartz tube and boat, sometimes, liner, injector, T/C-tube, etc.
For high temperature versions, SiC tube and boat are available.

Quartz and SiC parts need regular cleaning.

Automation:

Elevator.
Fully automatic loading by robot.

New alternative furnace for R&D facilities and pilot lines:

four vertical VF1000 Are you looking for a horizontal furnace, just because it is much cheaper than a vertical one? Do you have a small throughput and would you like to run small batches? Are you interested in a super performance? Koyo Thermo Systems developed a vertical furnace just for you! Please have a look at Koyo Thermo Systems's new VF1000 furnace!

This new furnace is a small vertical furnace with full performance, especially designed for pilot lines and laboratories. It is a mini-batch version for 25 production wafer load. It is available for all wafer diameters 3" - 12". Manual loading of wafers keeps the costs down and guarantees a high degree of flexibility. Small dimensions also help reducing costs for the user. Automatic elevator and programmable controller are used to achieve high process performance. VF1000 furnaces are available for all processes and show the same performance as the big versions VF5100 and VF5300. Like the big versions, VF1000 furnaces are equipped with patented Koyo Thermo Systems LGO heating elements. The available temperature range is 140°C to 1250°C.

You can see and evaluate these furnaces in Uppsala at the Ångström Laboratory of the University which works together with Koyo as an application center for VF1000 vertical furnaces. On special request we can arrange for you also a visit at Southampton University in order to show these furnaces.

Please follow this link in order to find a comparison of advantages and disadvantages of vertical and horizontal furnaces!

Koyo Thermo Systems et Crystec sont prêts à étudier pour vous, le système qui répondra à vos exigences en présentant le meilleur rapport qualité / prix.

Crystec Technology Trading GmbH est à votre disposition pour vous aider dans la réalisation de vos projets.
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Koyo Thermo Systems Co., Ltd. est représentée en Europe par Crystec Technology Trading GmbH