| clean conveyer furnaces for the flat panel display industry | ||
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Koyo Thermo Systems Co., Ltd. is represented in Europe by
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francais Verticals Horizontals RTP Ovens FPD Conveyor Industrial Ceramic LPE Cracker LGO Moldatherm |
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There are two types of vertical
walking beam ovens available, type VX and type VWB.
In both cases the panels are transferred to the process chamber
one by one, running up the first process tower, are transferred to the
second process tower, running it down and are transferred then to a
cooling station. Input and output can be designed for an in-line system
or as a cassette transfer system. The VX type has a special vertical
panel transport system that holds the panels at its corners and moves
it by a rotating claw system. It can be used for big panels (550mm x
650mm) also. However you will see some sagging of the samples in this
case. This problem is avoided in the VWB machine that uses a fork type
transport system, which avoids the sagging of the samples ,but needs a
larger footprint.
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This oven is mainly used for
polyimide pre-bake and main bake. The construction is very reliable.
Quartz pins on the stainless steel beams hold the glass plates.
The IR heating ensures a fast heating of the polyimide layer. The glass
plate is not so much heated. Soak time is only 12.6 min. and the
throughput of this oven is therefore rather high. By the use of this
furnace the surface hardening of the polyimide layer can be avoided.
Hardening takes place very homogenious. The furnace can be operated at
temperatures up to 380°C with a temperature uniformity of ±
5°C.
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These types of furnaces process full
cassettes.The cassettes are loaded by a robot, run through the furnace,
are unloaded again by a robot and the empty cassettes are transferred
back to the input side of the furnace. Both types of ovens are using
the same principle, just the transport mechanism is different: In one
case, a walking beam mechanism is used and in the other case the
cassettes are moved by a ceramic chain. This oven has a high
flexibility concerning process time.
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This new development allows the
processing of 16 substrates at a time without the use of cassettes. The
panels are transferred to a set of forks that hand over all 16 panels
at the same time to the next set of forks. Flexibility is as high as
for the horizontal beam furnaces and cleanliness and low-sagging
properties are similar to the VWB oven. No cassette back-transport is
necessary. This oven is therefore space saving also. It can be used in
an in-line configuration also, but has a tact time of 20 min. It is
possible to process glass plated with different dimensions.
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Two different types of hot plate
heating equipment is also available from Koyo Thermo Systems. First
version transports the wafer by a teflon belt, second version uses a
shuttle transport system. In both cases wafers are processes one by
one. Max. temperature is 150 °C / 200 °C.
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For special applications in FPD
production, using high temperatures or special gas atmosphere, a large
diameter vertical furnace type VF4000 can be used. Processes compatible
to those in semiconductor processing can be used (like oxidation or
poly-Si deposition). A sample size up to 730mm x 920mm (G4) is possible. Up
to 50 panels can be processed at a time.
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Clean ovens can be used for
laboratory work or in an automatic version for batch processing, using
inert gases. You can find a detailed description of our box ovens at a separate page.
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The automatic version consists of a
loading station, a precision robot system which moves the glass plates
from the cassette to the oven and a set of ofens.
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Roller hearth furnaces have been
designed to anneal large and heavy plasma display panels. The transport
inside this clean, horizontal, continuous furnace is done by stainless
steel rods. In order to avoid metallic contamination, ceramic tubes,
made of pure alumina are installed over these steel rods. This
combination turned out to be the best in order to achieve both, high
throughput and high yield. Two layers of panels can be processed at the
same time, mounted on top of each other by a special spacer system. All
roller hearths are driven by a special chain transmission system that
avoids slip during the transport of the panels. The furnace itself
consists of a special glass muffle and far IR MoldathermTM
heaters. An advanced temperature control system ensures a temperature
uniformity of less than 1 °C within a large size glass panel.
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Koyo Thermo Systems and Crystec will be pleased to engineer a cost effective system to satisfy your most demanding and exacting requirements.
| Crystec Technology Trading GmbH will be pleased to further discuss details with you. | ||
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