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Koyo Thermo Systems Co., Ltd. est représentée en Europe par
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English
Deutsch
Francais Verticaux Horizontaux RTP Fours blancs FPD Fours à Tapis Industriel Céramique LPE Séparateur LGO Moldatherm |
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Koyo Thermo Systems manufactures all types of horizontal and vertical furnaces, cluster tools, heating elements, RTP equipment, FPD processing equipment, liquid phase epitaxy systems, convener and industrial furnaces.
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Vertical FurnacesKoyo Thermo Systems manufactures
numerous versions of vertical furnaces
with full automation or manual loading for semiconductor applications.
Smaller versions for pilot and laboratory applications are available.
Special versions for low temperature applications, e.g. for poly-imide baking, SOG or hydrogen anneal are specialties of Koyo Thermo Systems. |
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Horizontal Furnaces
Koyo Thermo Systems still manufactures numerous versions of
horizontal furnaces with full automation or manual loading, although the use of
this equipment becomes less frequent in modern semiconductor factories.
Today vertical furnaces are state of the art and even R&D facilities
change more and more to this type of furnace. Just for solar applications, horizontal furnaces are still common. Smaller versions of horizontal furnaces
for pilot and laboratory applications are available.
Special versions for low temperature applications, e.g. for poly-imide baking, SOG or hydrogen anneal are specialties of Koyo Thermo Systems. |
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Rapid Thermal ProcessingKoyo Thermo Systems RTP furnaces
(RLA-xxxx) offer a unique lamp arrangement with upper and lower cross lamp arrays.
A patented temperature distribution tool provides outstanding and unparalleled temperature uniformity
resulting in process repeatability and minimization of slip line propagation.
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Clean Ovens and Laboratory Furnaces
A separate division of Koyo Thermo Systems produces all types of ovens
and furnaces for laboratory applications. These ovens and furnaces can be
customized to meet total customer requirements.
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FPD Processing Equipment
Koyo Thermo Systems is the leader in heat treatment and
processing of LCDs. Main processes are glass plate anneal, seal pre cure,
seal main cure, phosphor anneal, poly-imide cure.
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Conveyor Furnaces
Koyo Thermo Systems is producing a wide range of conveyor
furnaces for many applications like firing of thick films, firing of condenser
electrodes, firing of thermal heads, all types of sealing and annealing and drying,
soldering, brazing, re-flow, and resin curing.
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Industrial FurnacesKoyo Thermo Systems produces many kinds
of furnaces, kilns and ovens for the automotive and construction industry. Several
applications like carbonitriding, carborizing, hardening, nitriding, annealing,
quenching, sintering and brazing are available. Loading of the furnaces
can be done from the side, the front or the bottom. Various process
gases and vacuum capability can be included.
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Ceramic Furnaces
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Liquid Phase Epitaxy EquipmentKoyo Thermo Systems produces equipment
for liquid phase epitaxy, based either on a horizontal furnace or on a vertical furnace. The heating of
the growth chamber is achieved by LGO heating elements. The chamber can be evacuated and an inert gas or hydrogen gas atmosphere can be established. Special sealed feed-through allow the movement of
the samples or of the semiconductor melts in the chamber.
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Ammonia CrackerThe Koyo Thermo Systems NH3-Cracker
"AM" is used for the production of forming gas. Hydrogen and Nitrogen are generated in a
cost effective way in a volume ratio of 3 : 1 or in a weight ratio of 14 :
3. Capacities from 5m3/h to 60m3/h are available.
The forming gas is used in conveyor furnaces and in tube furnaces for
anneal processes in a reducing atmosphere, brazing, sintering, de-oxidation,
and nitridation.
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LGO Heating Elements
Patented LGO heating elements have a thermal mass that is <50%
of equivalent industry heating elements. LGO heaters have superior
temperature uniformity, offer much faster temperature ramping than standard
industry heating elements and offer superior control at low temperatures.
Durability and extended lifetime are key features.
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Moldatherm Heating ElementsKoyo Thermo Systems produces different
kinds of heating elements. The plain type is used in Koyo Thermo Systems conveyor
furnaces. It can be used also individually by the customer for the
construction of special furnaces or furnace chambers or heating areas.
The half cylinder type of the Moldatherm heating elements can be used by
customers to design high temperature heating mantles for tubes. This
heating elements can be used for temperatures between 140°C and 1250°C.
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Koyo Thermo Systems et Crystec sont prêts à étudier pour vous, le système qui répondra à vos exigences en présentant le meilleur rapport qualité / prix.