Petits four verticaux pour la recherche et le développement.
	Koyo Thermo Systems Co., Ltd. est représentée en Europe par Crystec Technology Trading GmbH
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VF-1000

A Furnace for R&D, and small runs of mixed components

The VF-1000 has been designed specially for use in experiments and the production of small runs of various items. This popular vertical furnace offers outstanding cost performance and can be used in a wide range of applications, including the processing of 300mm wafers.

Summary

The VF-1000, upgraded to process semiconductors, is based on the Micro-series vertical furnace (Micro TF), originally designed as a low-cost/multipurpose/compact unit. The only manual operation is the loading of the wafers: all other functions are identical to those featured in our upstream models. The operation is extremely simple - even an untrained person can quickly master the VF-1000.

Features

1. Cost Outstanding cost performance. 2. Performance Apart from wafer transfer, all other VF-1000 processing functions are identical to those of our larger models. The VF-1000 uses our own LGO heater unit. 3. System controller Two type of system controller, DP-1000 and MODEL 9700, are available. DP-1000 controls simply temperature and valves. MODEL 9700 has several other functions including MFC controller, display works background, network system(able to connect 16 units). 4. Compact A compact footprint allows the VF-1000 to be installed even in small laboratories. 5. Multifunctional Options can be added to the basic VF-1000 system to upgrade its performance for LPCVD (Low Pressure Chemical Vapor Deposition) processing and other high-end applications.

Specification

Type

VF-1000 : Atmospheric process
VF-1000LP : LPCVD process

Variation

Process(Example)

• Pyrogenic oxidation
• Anneal
• Sintering
• H2 Anneal
• Polyimide bake

• Poly-Si
• Doped Poly-Si
• Silicon nitride
• HTO
• TEOS
• LTO

Crystec Technology Trading GmbH, Germany, www.crystec.com, +49 8671 882173, FAX 882177

VF-3000

Compact Body with Various Functions!

The "VF-3000" has been developed as a vertical furnace with condensed various functions which are required for the polyimide curing and other semiconductor processes. The compact body with high cost performance will realize a stable production environment. This vertical furnace was developed for customers who need a furnace for Research and Development which is cost-efficient but also meets higher requirements like an automatic loading of the wafers. A manual loading has the risk of a contemination of the wafer. Consequently, the VF-300 is a product in between the small VF-1000 furnace with manual loading and our larger fully automated furnaces for mass production.

Features High cost performance (Approx. 50% of mass production system) Saving footprint (Approx 70% of mass production system) Full automatic transfer of water(15 min./batch) Ultra clean (Atmosphere in the furnace: Class 1) High performance LGO Heater has been mounted.

Specification

Crystec Technology Trading GmbH, Germany, www.crystec.com, +33/476/911002, FAX 911168

Tous les modèles de fours listés ci-dessus répondent aux normes CE et sont certifiés chez le constructeur par un organisme agréé.

Utilisez ce lien pour en savoir plus sur: comparison of advantages and disadvantages of vertical and horizontal furnaces!

Koyo Thermo Systems et Crystec sont prêts à étudier pour vous, le système qui répondra à vos exigences en présentant le meilleur rapport qualité / prix.

Crystec Technology Trading GmbH est à votre disposition pour vous aider dans la réalisation de vos projets.
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