Poly-Flow Engineering, LLC
Poly-Flow produces wet processing equipment to maintain advanced semiconductor fabs all over the world.
In June 2004, Ktech Corporation purchased the assets of Poly-Flow Engineering, Inc., and it became Poly-Flow Engineering, LLC, a subsidiary of Ktech Corporation. Two years later, the company moved from Sylmar, CA, USA to Albuquerque, NM, USA very near to Ktech Corporation in the Sandia Science and Technology Park.
Poly-FLow offers cutting edge equipment in 200/300 mm configurations for quartzware, metal parts, ceramic parts, FOUPs, FOSBs, SMIF Pods and wafers.
Also offered are standard and custom equipment utilized in the medical and optical fiber industries. In addition state-of-the-art chemical management, blending and delivery systems is available.

Poly-Flow produces the following systems:
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OMNICLEAN
- Vertical furnace tubes up to 16 3/4 in diameter can be cleaned.
- Oversize carousel is equipped with specialized fixturing to handle boats,
T/Cs and pedestals.
- Meets the stringent H6 building code by storing less than 25 gallons of acid for
a dual chemical cycle.
- Available with fire safe construction featuring Corzan 4910 exterior.
- 200mm and 300mm configurations available.
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TYPHOON
- Dual oversize carousels are capable of handling a wide range of parts.
- A tube or liner plus various items on each side.
- Each side operates with simultaneous and independent recipes with isolated process systems.
- Four tanks included to provide a recirculating and a single use polish acid for each side.
- 200mm and 300mm configurations available.
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TYPHOON SC
- Now an even more affordable all spray system is available.
- Huge savings over immersion cleaning.
- Greatly reduce acids on board.
- Small footprint.
- Fast cycle.
- Proven Typhoon cleaning process.
- Advanced safety.
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DOUBLE/DOUBLE
- Dual chamber system precision cleans quartzware behind a single front door.
- Each system has separate tube and parts chambers or twin tube chambers
with custom fixturing.
- Right chamber handles tubes 48 to 120 long.
- Left chamber has 360° rotating carousel for spray etching of cantilevers, sheaths, boats, paddles, pull rods and assorted parts.
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Triple Tower
- Vertical tube cleaner with three distinctive types of cleaning for
all horizontal furnace parts.
- Tubes are consistently etched with the patented Turbo-NozzleTM to clean both inside and outside.
- Paddles, cantilevers, sheaths and master boats rotate on the carousel for 360° etching and rinsing.
- Boats and assorted small parts are immersion etched in the 16 X 12 X 12 sink below the carousel.
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EPITAXIAL BELL JAR CLEANER
- Wide range of soft-touch jaws handle the largest 300mm tubes up to 20 inches.
- Fully counter-balanced design is conservatively rated at 100 lbs. at full height and reach.
- Provides S-8 compliance for Poly-Flow quartzware cleaners.
- 200mm and 300mm configurations available.
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VERTICAL FURNACE QUARTZWARE CLEANER (VFQC)
- Simultaneous cleaning of tubes and liners with dual rotating overhead spray manifolds.
- Dependable immersion cleaning for latest high capacity boats in the largest sink available today.
- Cleaning chamber handles 56 tubes with ease.
- One, two or three acid systems yield process flexibility.
- 200mm and 300mm configurations available.
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HORIZONTAL QUARTZWARE CLEANER
- Features two process chambers.
- Front chamber provides selectable inside/outside etching for furnace tubes up to 86 standard.
- Rear chamber is fixtured for immersion etching of cantilevers,
sheaths, boats, paddles, pull rods and other accessories.
- Dual acid configuration with one recirculating and one single use (polish etch).
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Parts Cleaner
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AUTOMATIC ACID CLEANING SYSTEM(recirculated chemicals)
- automatic process.
- chemical recirculation from holding tank.
- chemical filtration (selectable)
- multiple BCDS fills to holding tank.
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AUTOMATIC ACID CLEANING SYSTEM(single use chemicals)
- multiple BCDS fills to process sink.
- programmable ratios in process sink.
- variable sink sizes.
- 1 or 2 process sinks.
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AUTOMATIC SOLVENT CLEANING SYSTEM(recirculated chemicals)
- solvent recirculation from holding tank.
- solvent filtration (selectable).
- ultrasonic agitation.
- 1 or 2 solvent holding tanks.
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AUTOMATIC SOLVENT CLEANING SYSTEM(single use chemicals)
- multiple BCDS fills to process sink.
- programmable ratios in process sink.
- ultrasonic agitation.
- variable sink sizes.
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AUTOMATIC ACID AND BASE CLEANING SYSTEM
- multiple BCDS fills each process sink.
- programmable ratios in each process sink.
- 1-5 process sinks.
- simultaneous/independent operation.
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SEMIAUTOMATIC ACID CLEANING SYSTEM
- fill/dump rinsing.
- overflow rinsing.
- programmable rinse times.
- variable sink sizes.
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MIXED CHEMICAL WORK STATION
- solvent sink and acid sink.
- manual rinsing.
- overflow rinsing.
- variable sink sizes.
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MANUAL SOLVENT WORK STATION(solvents)
- timed process.
- variable sink sizes.
- 1 or 2 process sinks.
- AutoFlow II controller.
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MANUAL SOLVENT WORK STATION(corrosives)
- manual rinsing.
- overflow rinsing.
- variable sink sizes.
- multiple process sinks.
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MultiSpec 280 Box & Cassette Cleaner
- Batch cleaning of SMIF Pods, boxes and cassettes.
- No metals in the process stream.
- Vertical design reduces total floor space by 60%.
- Lightly heated HEPA filtered air directed throughout the process chamber to speed drying.
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MultiSpec 277-I
- FOUP & FOSB Cleaner.
- Manual load high through put.
- No high speed rotation.
- Ultra clean process with no metals in the process stream.
- Lightly heated HEPA filtered air directed throughout
the process chamber to speed drying.
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MultiSpec 277-II
- The MS-277-II Fully Automated/Factory Integrated system
is in the final engineering stages.
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FAB Equipment
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SOLVENT BOTTLE CLEANER (S-992)
- Remove old resist automatically from bottles.
- Recirculated NMP minimizes waste.
- Sloped work deck for ergonomic loading.
- Stainless steel basket for rinsing bottle caps.
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ACID BOTTLE CLEANER (S-994)
- Cleans up to 18 bottles per load.
- Meets EPA regulations.
- Sloped work deck for ergonomic loading.
- Natural polypropylene basket for rinsing bottle caps.
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ACID DRUM CLEANER
- Automatically rinses 55 gallon drums for safe transport and
recycling per EPA regulations.
- Optional rinse to programmed pH value.
- Automatic inversion meets ergo requirements and aids drainage.
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VDF QUARTZWARE OVEN
- Increase furnace through put with a pre-diffusion bake of
VDF tubes, boats and accessories.
- Large capacity holds 8 tubes and 8 boats per cycle.
- Twin rotating carousels for easy access to the quartz tube and boats.
- 150°C dry cycle, 190°C desorption cycle, 40°C stand-by
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Medical Benches
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Poly-Flow Engineering, LLC offers benches for processing stents as used by in the cardiovascular industry. The benches are engineered for providing the descaling process and electro-polishing process utilizing a modular approach for bench layout. High tech chemical handing, heating and ultrasonic agitation is standard.
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IPA systems are available for sterilization processes for many critical components such as pace makers and insulin injection systems. Aqueous batch processing systems are also available in many configurations for many applications in the medical industry.
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Chemical Delivery System
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Automated delivery systems for acids and bases are available to hold one, two or three drums. Delivery systems are designed to interface with Poly-Flow tools and other manufacturer's tools.
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* Wir vertreten Polyflow zusammen mit MDC Schweiz. Wir sind verantwortlich für Deutschland, Österreich und Nordeuropa.
| Crystec Technology Trading GmbH est à votre disposition pour vous aider dans la réalisation de vos projets. |
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