Trion Technology survol de l'entreprise.
	Trion Technology est representé de Crystec Technology Trading GmbH
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Trion Technology

Since its founding in 1989, Trion Technology, Inc., headquartered in Clearwater, Florida, has become the largest domestic US supplier of custom Plasma Etch and Deposition Equipment. They also have a significant presence in Asia with equipment in Japan, Taiwan, Philippines, China, Malaysia and Singapore. In Europe they are exclusively represented by Crystec Technology GmbH, Altötting, Germany.

Trion headquarters in Clearwater

The production of the plasma etch and PECVD machines is located in Clearwater, Florida. There you find also in a separate building the machine shop in which all machines necessary for metal work and production are available incl. aluminium anodizing. Trion is pre-producing all main equipment parts and has a stock for parts from third vendors. This way, Trion can ensure pretty short delivery times for their machines.

Machine Shop in Clearwater	Tempe laser development and test center

Various types of plasma equipment are available, for plasma etchers as well as for PECVD. Usually single wafers are processed. The loading and unloading can be done either directly or via a loadlock or using a central handler with a VCE (Vacuum cassette elevator). For ashing of foto resist, a special low cost production tool has been developed. For failure analysis several types of plasma etchers are available, normally using direct loading.
In the development and test center in Tempe, Arizona and soon also in the production building in Florida a complete set of Trion plasma tools is available, which is used there for laser development but is also available for customer test runs. Caused by the fact that these machines are used in a company owned semiconductor development center all necessary measurement and test equipment is available e.g. a raster electron microscope, which is necessary to for failure analysis test runs.

In the following table you get an overwiev over the available plamsa machines.

Company Milestones

2007 Crystec Technology Trading GmbH starts representing Trion in Europe.
2006 350th machine ships. Trion introduces the Apollo, an affordable microwave photoresist stripper, at SEMICON West 2006.
2005 Trion develops and releases a competitively-priced multi-chamber photoresist stripper. Trion releases a DRIE system for MEMS applications.
2004 300th machine ships.
2002 Trion sets up an on-site 12,000 sq. ft. machine shop in Clearwater, enabling faster production and more competitive pricing.
2001 200th machine ships. Trion completes a 4,000 sq. ft. expansion to the Tempe facility. Trion moves all manufacturing operations to a 10,000 sq. ft. building in Clearwater.
2000150th machine ships. Trion delivers the first fully-automated systems for high volume production. Trion sets up a fully equipped lab for demo and process development in Tempe. Trion purchases and moves into new, larger facilities on South 52nd Street in Tempe.
1999 100th machine ships. Trion introduces an ICP stripper designed to address the complex issues associated with feature sizes below 0.5 microns on ICs. It removes organic and inorganic materials eliminating the need for post-strip wet chemical processes.
1998 Trion introduces the Oracle, a flexible, low-cost turnkey cluster tool capable of supporting independent process reaction chambers for etch, deposition and sputtering of chlorinated or fluorinated chemistries.
1997 Trion expands into a new facility on Park Lane in Tempe.
1996 50th machine ships. Trion expands sales and services offices in Europe and Asia.
1995 Trion begins manufacturing and service of the Orion PECVD system and Phantom RIE tool to semiconductor research and development companies, universities and foundries.
1994 25th machine ships.Trion begins a joint development project with SEMATECH on liquid source silicon nitride, elimination of silane for safety concerns.
Trion relocates to Tempe, Arizona.
1993 Trion begins manufacturing and service of the Minilock-Phantom (a loadlocked RIE tool) to semiconductor research and development companies, universities and foundries.
1990 Trion delivers the first tool to AMD.
1989 Addison (Randy) Crockett establishes Trion Technology, Inc. in Austin, Texas.

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