GУвлажнитель газа с контролем точки росы для увлажнения технологического газа
Установки для полупроводниковой промышленности
This equipment is designed for operation under atmospheric pressure only
(no overpressure, no low pressure) and has a small pressure loss due to the centrifugal action of the rotor.
The heating of the water tank can be done either electrically or by heating coil.
The tempering of a heating coil requires an external temperature control unit,
but can be used also for cooling the water by a chiller, enabling
the setting of a dew point between 2°C and 80°C.
The humidifier is mostly used for humidification of inert gases. For the humidification of hydrogen, an ex-protected version is available. In this case, a compressed air motor is used for the rotor and indirect heating or cooling is selected.
The tank can be made of plastic or stainless steel. Size and gas flow of the system can be widely adapted to your needs.