Centre d'Application Laboratoire Ångström de l'Université de Uppsala.
Université de Uppsala, Suéde

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Laboratoire Ångström de l'Université de Uppsala

Ångström Laboratory of the University of Uppsala, Sweden fixed a close cooperation with the companies of Koyo Thermo Systems Co., Ltd. and Crystec Technology Trading GmbH in the field of semiconductor furnace technology.

 Laboratoire Angstrom

The Ångström Laboratory is the materials research center of Uppsala University. The laboratory is involved in research on modern materials as well as undergraduate and graduate education. Integrated circuits, solar cells, electrical batteries and wear resistant mechanical components are examples of areas of research. The laboratory enjoys substantial external support, has around 350 employees, 1000 undergraduate students and a yearly turnover of approximately 200 MSEK.

The joint laboratory facility at the Ångström Laboratory is usually referred to as the cleanroom as its basic construction is that of a cleanroom. The total area of 2000 m2 includes over 30 lab rooms with service corridors. The major part of the cleanroom is classified as 10 000. 150 m2 is constructed as a class 100 cleanroom with unidirectional airflow from the ceiling to the floor. It is, of course, possible to create smaller areas with an even higher degree of cleanliness such as class 10 or class 1. The temperature is stable within ± 1 °C. The relative humidity is held constant at 43 ± 3 % in one third of the cleanroom.

In this cleanroom 10 vertical furnace type µTF have been installed for the following applications:

#5

High Temperature

Anneal

400°C – 1250°C

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LTO, BPSG

& TEOS

400°C – 900°C

#10

#4

Phosporous doping

with solid source

400°C – 1100°C

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Silicon-Nitride

deposition

400°C – 900°C

#9

#3

Boron doping

with solid source

400°C – 1100°C

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Poly-Silicon

deposition

400°C – 900°C

#8

#2

Oxidation

External torch, trans-LC

400°C – 1100°C

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Post Metal Anneal

Forming Gas

200°C – 800°C

#7

#1

Oxidation

External torch, trans-LC

400°C – 1100°C

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Gate Oxidation

External torch, trans-LC

400°C – 1100°C

#6

  salle de blanche Uppsala     four vertical

All furnaces are equipped with low thermal mass Koyo Thermo Systems LGO heaters, which insure a very good temperature homogeneity in the furnace.

The control of the furnaces is done by SPS modules which are controlled by a Windows NT computer.

Koyo Thermo Systems

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